Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches
Peer-Reviewed Publication
Updates every hour. Last Updated: 15-May-2026 00:16 ET (15-May-2026 04:16 GMT/UTC)
Measuring high aspect ratio and composite micro-trenches without damage is critical for advanced microfabrication, yet conventional coherence scanning interferometry often suffers from a low signal-to-noise ratio and limited lateral resolution. A team from Nanjing University of Science and Technology presents FP-CSI, a transmissive near-infrared interferometric modality that combines aperture synthesis from Fourier ptychographic microscopy with quantitative phase recovery of coherence scanning interferometry, enabling robust 3D morphology reconstruction without iterative phase retrieval.
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