金刚石上β-Ga2O3薄膜外延机制及结构 (IMAGE)

Science China Press

金刚石上β-Ga2O3薄膜外延机制及结构

Caption

(A) 镓辅助外延策略的原子尺度示意图。(B) 金刚石 (111) 衬底上β-Ga2O3薄膜的X射线衍射(XRD)2θ扫描图、(C)XRD摇摆曲线和(D)XRD-Φ扫描图。(E) β-Ga2O3/金刚石异质界面的截面高角环形暗场扫描透射电子显微(HAADF-STEM)图像、(F)选区电子衍射(SAED)图、(G)能量色散X射线谱(EDX)元素分布图以及(H, I)界面处原子级分辨的 HAADF-STEM图像。

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©《中国科学》杂志社

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