Figure 2 | Prototype of the grating interferometer system for 3D measurement. (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Figure 2 | Prototype of the grating interferometer system for 3D measurement.

Caption

Figure 2 | Prototype of the grating interferometer system for 3D measurement. (a) Heterodyne dual-frequency laser source. (b) Measurement system, comprising the laser power control module (HWP and P), Integrated reading head, 2D measurement grating, 3-DOF Piezoelectric Stage (PZT), and a real-time processing and display module (PD, filter amplifier circuit, FPGA calculation and real-time display module).

Credit

Can Cui, Lvye Gao et al.

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License

CC BY

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