Figure 2 | Real-time displacement trajectory detection results of the target and their statistical analysis. (IMAGE)
Caption
Figure 2 | Real-time displacement trajectory detection results of the target and their statistical analysis. a, Experimental demonstration in the laboratory and precise calibration process of the precision translation stage. b, Reference real-time displacement curve after metrological calibration at a target velocity of 23.7 mm/s. c, Reference velocity variation curve after metrological calibration at a target velocity of 23.7 mm/s. d, Real-time displacement curves measured by the system at a target velocity of 23.7 mm/s. e, Accuracy and error probability analysis of dynamic displacement. f, Performance of dynamic ranging. When the velocity of the precision translation stage was in the forward direction, maximum RMS was 852.8 nm. When the velocity was in the reverse direction, maximum RMS was 930.8 nm.
Credit
Yujia Li et al.
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CC BY