High-resolution inspection via deep-ultraviolet (DUV) structured illumination. (IMAGE)

Chinese Society for Optical Engineering

High-resolution inspection via deep-ultraviolet (DUV) structured illumination.

Caption

Dynamically adjustable DUV third harmonic structured beam delivered through a reflective objectives and generated Moiré pattern with a periodic sample. The period of the Moiré pattern can be changed depending on the pitch and angle of the sinusoidal DUV beam.

Credit

Young-Jin Kim’s group

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