Demonstration of wafer inspection (IMAGE)

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Demonstration of wafer inspection

Caption

Fig. 3 Demonstration of wafer inspection. (a)         Image of the measurement sample; (b–d) Three-dimensional reconstruction of microfabricated structures; (e–g) Extracted surface profiles along the dashed lines in the corresponding 3D maps.

 

Credit

Xiaoli Jing, Qiming Liao, Lingling Huang, Rui You

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