FIG 3 (IMAGE)
Caption
Figure 3: SEM images of ablated spots on the sapphire surfaces with different configurations: GHz burst LIPAA (P= 10) at intra-pulse fluence of (a) 0.22 J/cm2, (b) 0.27 J/cm2, and (c) 0.53 J/cm2, single-pulse mode LIPAA (10 shots of fs laser pulses at a repetition rate of 10 Hz) at same intra-pulse fluence of (d) 0.22 J/cm2, (e) 0.27 J/cm2, and (f) 0.53 J/cm2 with (g) schematic scheme of two-step process, and single-pulse mode direct fs laser ablation at laser fluences of (h) 2.33 J/cm2, (i) 3.13 J/cm2, and (j) 8.05 J/cm2. Schematic illustrations of each scheme are shown at left side of SEM images.
Credit
OES
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