KAIST Tames a Semiconductor Greenhouse Gas 6,000 Times More Potent Than CO₂ with the ‘Power of Disorder’ (IMAGE)

The Korea Advanced Institute of Science and Technology (KAIST)

KAIST Tames a Semiconductor Greenhouse Gas 6,000 Times More Potent Than CO₂ with the ‘Power of Disorder’

Caption

Figure 1. Design and CF4 removal performance of an aluminate catalyst incorporating multiple evenly mixed metals for treating the semiconductor process gas CF4.

Credit

KAIST

Usage Restrictions

No

License

Licensed content

Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.