Tunable 3D pressure sensor design and performance. (IMAGE)
Caption
Tunable 3D pressure sensor design and performance. This figure shows the design concept, working mechanism, and sensing performance of the tunable flexible capacitive pressure sensor. A laser-patterned two-dimensional precursor is transformed into a cage-like three-dimensional structure through buckling-guided assembly on a pre-stretched substrate. Under out-of-plane compression, the electrode gap decreases and capacitance rises; lateral stretching can further tune the gap and adjust the sensing range and sensitivity. The lower panels highlight the sensor’s rapid response and recovery, as well as its strain-dependent pressure–capacitance behavior, demonstrating stable and adaptable performance for dynamic pressure monitoring.
Credit
Microsystems & Nanoengineering
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