Experimental Setup and SEM Characterization of MEMS Triangular Comb Drive Actuators. (IMAGE)

Aerospace Information Research Institute, Chinese Academy of Sciences

Experimental Setup and SEM Characterization of MEMS Triangular Comb Drive Actuators.

Caption

Experimental Setup and SEM Characterization of MEMS Triangular Comb Drive Actuators.

Credit

Microsystems & Nanoengineering

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CC BY-NC-ND

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