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National Research Council of Science & Technology

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Senior Researcher Hyeong-U Kim (Co-corresponding Author) from the Semiconductor Manufacturing Research Center at the Korea Institute of Machinery and Materials, Professor Taesung Kim (Co-corresponding Author) from the Department of Mechanical Engineering at Sungkyunkwan University, Researcher Hyunho Seok (First Author) from Sungkyunkwan University.

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Korea Institute of Machinery and Materials (KIMM)

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