Vertically Integrated Self-Monitoring AlGaN-Based Deep Ultraviolet Micro-LED Array with Photodetector Via a Transparent Sapphire Substrate Toward Stable and Compact Maskless Photolithography Application (IMAGE)

University of Science and Technology of China

Vertically Integrated Self-Monitoring AlGaN-Based Deep Ultraviolet Micro-LED Array with Photodetector Via a Transparent Sapphire Substrate Toward Stable and Compact Maskless Photolithography Application

Caption

Schematic diagram of self-stabilizing luminescence system built with vertically integrated devices.

Credit

Images by Prof. Sun’s team

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