Principle diagram of large-aperture differential confocal-interferometric measurement system. (IMAGE)
Caption
(a), large-aperture laser differential confocal-interferometric measurement path; (b), large-aperture beam-expansion system; (c), large-aperture mechanical phase-shifting system; (d), laser differential confocal signal-processing module; (e), interference signal-processing module; (f), ultra-long focal length; (g), convex spherical ultra-large curvature radius; (h), concave spherical ultra-large curvature radius; (i), concave spherical interference; (j), convex spherical interference.
Credit
by Weiqian Zhao, Liang Tang, Shuai Yang, and Lirong Qiu
Usage Restrictions
Credit must be given to the creator.
License
CC BY