Optimization system and the fully parameterized system-level model (IMAGE)
Caption
a Generic process flow of the system-level optimization system based on a GA. b Schematic view of the parameterized system-level model comprising (i) a mechanical ROM implemented in MEMS+®, (ii) an electronic model implemented in Simulink. c Schematic view of a fully parameterized AMPACC model and its ROM, including anchors, a proof mass, levers (Arm A, input beams, pivot beams, output beams), output comb fingers and anchors. The sensing direction is along the y-axis. d Pivot-input beam area. Freeform beam model defined by parameters denoted in red and blue in TABLE 1.
Credit
Microsystems & Nanoengineering
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CC BY